The NIMS-led research team successfully developed a high-quality diamond cantilever with the highest mass (Q) factor at room temperature. For the first time, the group successfully developed a single crystal diamond microelectromechanical system (MEMS) sensor chip that can be driven and detected by electrical signals. These achievements can promote the research of diamond MEMS, and its sensitivity and reliability are significantly higher than existing silicon MEMS.
MEMS sensors - where microscopic cantilevers (projected beams that are only fixed at one end) and electronic circuits are integrated on a single substrate - have been used for gas sensors, mass analyzers and scanning microscope probes. For MEMS sensors to be used in a wider range of fields, such as disaster prevention and medicine, the sensitivity and reliability need to be further improved. Diamond's elastic constant and mechanical constant are among the highest of all materials, so it is expected to be used to develop MEMS sensors with high reliability and sensitivity. However, due to its mechanical hardness, three-dimensional micromachining of diamond is difficult. The research team developed "smart cutting"
The research team then developed a new technology that allows atomic etching of the diamond surface. This etching technique allows the set to remove defects on the bottom surface of a single crystal diamond cantilever fabricated using a smart cutting method. The resulting cantilever shows a Q factor value - a parameter used to measure cantilever sensitivity - over one million; the highest in the world. The team then developed a novel MEMS device concept: a synchronous integrated cantilever, an electronic circuit that oscillates the cantilever, and an electronic circuit that senses the vibration of the cantilever. Finally, the team developed a single crystal diamond MEMS chip that can be driven by electrical signals and successfully demonstrated its operation for the first time in the world. The chip exhibits very high performance; it is very sensitive and can operate at low voltages and temperatures up to 600 °C.
These results accelerate research into the underlying technologies that are critical to the practical application of diamond MEMS chips, as well as the development of extremely sensitive, high speed, compact and reliable sensors that are capable of distinguishing the quality of light from a single molecule.
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