Changguang's commitment to the development of major national scientific instruments and equipment has passed acceptance

[ Instrument Network Instrument R & D ] On December 6, 2019, the Science and Technology Evaluation Center of the Ministry of Science and Technology organized a comprehensive acceptance meeting of the "National R & D of High-end Holographic Gratings" project in Beijing. The project passed the acceptance smoothly.

Group photo of representatives of the comprehensive acceptance meeting

At the acceptance meeting, the expert group listened to the project leader and researcher Qi Xiangdong from the Changchun Institute of Optics and Electronics Research Institute made a summary report of the project development work, watched the project video, and carried out remote video connection and development of high-end grating devices On-site inspection of the spectroscopic instrument and discussion of the inquiry. The meeting experts agreed that the project passed the comprehensive acceptance.

Grating is a kind of precision optical element with nano-precision periodic microstructure. In addition to playing the role of "chip" in various spectroscopic instruments, it is also important in many fields such as astronomy, lasers, optical communications, information storage, new energy, etc. application. High-end holographic gratings refer to holographic gratings with high spectral resolution, high diffraction efficiency, high reticle density, low stray light intensity or special shapes, and volume holographic gratings, and represent the cutting-edge level of grating manufacturing technology.

At the beginning of the "high-end holographic grating research and development" project, foreign scientific research institutions and companies basically monopolized the high-end holographic grating market. With the increasing demand for high-end spectroscopic instrument products and the expansion of the international market in China's spectroscopic instrument industry, Changchun Opto-Mechanical relies on this special support to develop high-end holographic holograms represented by high-line density gratings and large-diameter high-diffraction efficiency gratings. The research and development of gratings aims to comprehensively improve the development level of holographic-ion beam etching gratings in China, and develop high-end holographic gratings with strategic significance and representativeness and urgent needs, replacing imported imports while satisfying the independent innovation of China's spectrum analysis instruments. The demand for new holographic gratings; realizing the technological progress of the spectral analysis instrument industry with the development of key components as the guide, and the independent innovation of high-end holographic gratings to drive the independent innovation of spectral analysis instruments, improving the industrial chain of spectral analysis instruments, and strengthening the core of the instrument industry Competitiveness.

The project team established and improved high-end holographic grating manufacturing and testing equipment during the research and development cycle, comprehensively improved the high-end holographic grating process technology, and developed 11 internationally advanced high-end holographic gratings. At the same time, leading companies in the United Nations developed new gratings. 6 new spectroscopic instruments.

The first is the development of a large-caliber homogenizer, a large-aperture exposure system, a curved grating ion beam etcher, a large-aperture reactive ion etcher, a diffraction wavefront tester, and a diffraction grating stray light tester. Integrated development platform for manufacturing and inspection.

The second is the development of 11 high-end holographic grating masters, which solves the common basic problems of high-end holographic grating manufacturing process technology and equipment, and comprehensively improves China's grating manufacturing capabilities.

Third, six leading companies in China's spectrum analysis instrument industry carried out application demonstrations and industrialization promotion, and independently developed low stray light UV-visible spectrometers, new spark direct-reading spectrometers, high-speed single-channel scanning inductively coupled plasma emission spectrometers, and dual beams. Ultra-violet-visible spectrophotometer, medical imaging spectrometer, extreme ultraviolet-soft X-ray double-grating monochromator, and other six high-end optical disc analysis instruments.

Through the continuous support of this project, the high-precision, high-index, large-size high-end holographic gratings developed by Changchun Opto-Mechanics not only represent that China's ultra-fine processing technology has reached the world level, but also broke China's civilian spectrum instrument industry and the country. The high-precision gratings required in the strategic high-tech field are subject to the situation of people. It will play an important role in promoting the Chinese spectrum instrument industry to get rid of the situation of “organism and carelessness”, helping the Chinese spectrum instrument industry to change the status of low-end, and improving the ability to expand the international market effect.